Multifunctional lubricants to protect sensitive electronic components
In the field of electronics and semiconductor manufacturing, contamination can affect equipment accuracy, operation reproducibility, and equipment lifespan. When used in vacuum pumps and cleanrooms, high-performance lubricants help reduce contaminants and volatile gases generated in the space where electronics and semiconductors are manufactured. This increases yield while extending equipment lifespan.
Versatile, high-temperature, and corrosion-resistant lubricants (greases, lubricants, and vacuum pump oils) can also be used in a variety of production line components, including:
- bearing
- valve
- seal
- O-loop
- chain
- compressor
- Transmission
- Mechanical pumps and other components
Norbert ® high-performance lubricants provide excellent safety protection for the electronics and semiconductor industries. This long-lasting oil and grease is commonly used in oil pumps, dry pumps, vacuum systems, cleanrooms, robotic systems, and more. In these applications, Norbert ® high-performance lubricants are recognized by major vacuum pump manufacturers and OEM equipment suppliers to meet or exceed quality assurance requirements.
High stability safety lubricant for cleanrooms
Norbert ® high-performance lubricants can withstand extreme temperatures and pressures, surpassing hydrocarbon greases, silicone greases and chlorofluorocarbon greases in this regard, providing a more stable working environment for sensitive electronic components.
Since reactive chemicals and substances are themselves safety hazards for semiconductors and electronic components, the use of lubricants that are not compatible with these semiconductors or electronic components can damage the components. Norbert ® high-performance lubricants are chemically inert and biologically inert, so they are compatible with oxygen and do not react with virtually all chemicals, plastics, metals and elastomers.
Norbert ® lubricants not only provide stable and safe performance under severe operating conditions, but also have a longer service life, so there is no need to lubricate parts frequently.
Norbert ® performance lubricants also have other properties that are particularly suitable for the electronics and semiconductor industries, including:
- Excellent vapor pressure, as low as 10-13 mmHg in the temperature range of -15 ° C to 300 ° C (5 ° F to 572 ° F)
- Does not react with acidic or alkaline cleaners, disinfectants, vapors, and moisture, thus preventing damage to components
- Safe to use, free of volatile organic compounds (VOCs) or chlorine
- Minimal environmental footprint - renewable lubricants
- Compatible with chemicals commonly used in industry
Special Norbert ® lubricant
Norbert ® VPF (Vacuum Pump Oil)
Norbert ® VPF can make a difference in areas where traditional vacuum pump oils can cause safety, waste disposal and maintenance issues. Norbert ® VPF is highly stable and helps reduce waste and maintenance related issues. It is non-flammable and reduces the risk of fire in the pump.
In addition, Norbert ® VPF does not contain acetal groups, so it is not easily affected by Lewis acid, a key element in the semiconductor process. With these unique properties, Norbert ® VPF has been widely recognized by mainstream vacuum pump manufacturers.
Norbert ® LVP (low vapor pressure) grease
Norbert ® LVP grease does not explode, burn, decompose or react to form colloidal or solid deposits, nor does it support combustion.
For more information, please visit the product page.
